Lee, InhwanInhwanLeeFranke, Joern-HolgerJoern-HolgerFrankePhilipsen, VickyVickyPhilipsenRonse, KurtKurtRonseDe Gendt, StefanStefanDe GendtHendrickx, EricEricHendrickx2024-03-252024-02-272024-03-2520231932-5150WOS:001134890300006https://imec-publications.be/handle/20.500.12860/43598Hyper NA EUV lithography: an imaging perspectiveJournal article10.1117/1.JMM.22.4.043202WOS:001134890300006MULTILAYER MIRRORS