Rangelov, VentzeslavVentzeslavRangelovSarstedt, MargitMargitSarstedtSomerville, JohnJohnSomervilleMarschner, ThomasThomasMarschnerJonckheere, RikRikJonckheerePoelaert, AbelAbelPoelaert2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5605Exploring capabilities of electrical linewidth measurement (ELM) techniquesJournal article