Preferentially oriented BaTiO3 thin films deposited on silicon with thin intermediate buffer layers

George, John P.John P.GeorgeBeeckman, JeroenJeroenBeeckmanWoestenborghs, WouterWouterWoestenborghsSmet, Philippe F.Philippe F.SmetBogaerts, WimWimBogaertsNeyts, KristiaanKristiaanNeyts2021-10-212021-10-2120131931-7573https://imec-publications.be/handle/20.500.12860/22391Preferentially oriented BaTiO3 thin films deposited on silicon with thin intermediate buffer layersJournal article