Sol-gel growth of high-quality Pb(Zr,Ti)O3 films on RuO2 using seed layers

Norga, GerdGerdNorgaFè, LauraLauraFèWouters, DirkDirkWoutersBartic, AndreiAndreiBarticMaes, HermanHermanMaes2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3707Sol-gel growth of high-quality Pb(Zr,Ti)O3 films on RuO2 using seed layersProceedings paper