Theory and experiments of the impact of work function variability on threshold voltage variability in MOS devices

Zhang, XiaoXiaoZhangMitard, JeromeJeromeMitardRagnarsson, Lars-AkeLars-AkeRagnarssonHoffmann, Thomas Y.Thomas Y.HoffmannDeal, MichaelMichaelDealGrubbs, M.E.M.E.GrubbsLi, JingJingLiMagyari-Kope, B.B.Magyari-KopeClemens, BruceBruceClemensNishi, YoshioYoshioNishi2021-10-202021-10-2020120018-9383https://imec-publications.be/handle/20.500.12860/21926Theory and experiments of the impact of work function variability on threshold voltage variability in MOS devicesJournal article