Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films

Giangrandi, SimoneSimoneGiangrandiSajavaara, TimoTimoSajavaaraBrijs, BertBertBrijsArstila, KaiKaiArstilaVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720080168-583Xhttps://imec-publications.be/handle/20.500.12860/13765Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin filmsJournal article