Site selective integration of III-V materials on Si for nanoscale logic and photonic devices

Paladugu, MohanMohanPaladuguMerckling, ClementClementMercklingLoo, RogerRogerLooRichard, OlivierOlivierRichardBender, HugoHugoBenderDekoster, JohanJohanDekosterVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-202021-10-202012-081528-7483https://imec-publications.be/handle/20.500.12860/21246Site selective integration of III-V materials on Si for nanoscale logic and photonic devicesJournal article10.1021/cg300779v