Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assembly

Dubey, VikasVikasDubeyVan Huylenbroeck, StefaanStefaanVan HuylenbroeckTutunjyan, NinaNinaTutunjyanSlabbekoorn, JohnJohnSlabbekoornDe Wolf, IngridIngridDe WolfRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerCelis, Jean-PierreJean-PierreCelisCroes, KristofKristofCroesBeyne, EricEricBeyne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23777Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assemblyProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7028296