Milenin, AlexeyAlexeyMileninBoullart, WernerWernerBoullartQuli, FarhatFarhatQuliYouxian, WenWenYouxian2021-10-212021-10-212013-08https://imec-publications.be/handle/20.500.12860/22806Effect of chuck temperature adjustment on STI CDU and sensor wafer readoutsProceedings paper