Van der Linden, J. E.J. E.Van der LindenDe Dobbelaere, PeterPeterDe DobbelaereVan Daele, PeterPeterVan DaeleDiemeer, M. B.M. B.Diemeer2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3024Micromachined photodiode submount with integrated mirror for efficient out-of-pane coupling to planar polymeric waveguide circuitsJournal article