Everaerts, JurgenJurgenEveraertsJohnson, JoJoJohnsonBartic, AndreiAndreiBarticKaczer, BenBenKaczerLisoni, JuditJuditLisoniVander Meeren, HansHansVander MeerenWouters, D.D.Wouters2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5284Deposition of SBT and PZT thin films for FERAM applicationOral presentation