Surface-charge-collection-enhanced high-sensitivity silicon photodiodes for DUV and VUV spectral ranges

Shi, LeiLeiShiNihthianov, StoyanStoyanNihthianovHaspeslagh, LucLucHaspeslaghScholze, FrankFrankScholzeGottwald, AlexanderAlexanderGottwaldNanver, Liz KLiz KNanver2021-10-202021-10-2020120018-9383https://imec-publications.be/handle/20.500.12860/21500Surface-charge-collection-enhanced high-sensitivity silicon photodiodes for DUV and VUV spectral rangesJournal articlehttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6280660