The fabrication of a full metal AFM probe and its applications for Si and InP devices analysis

Hantschel, ThomasThomasHantschelTrenkler, ThomasThomasTrenklerXu, MingweiMingweiXuVandervorst, WilfriedWilfriedVandervorst2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3490The fabrication of a full metal AFM probe and its applications for Si and InP devices analysisProceedings paper