Falepin, AnneliesAnneliesFalepinJanssens, TomTomJanssensSeveri, SimoneSimoneSeveriVandervorst, WilfriedWilfriedVandervorstFelch, S.B.S.B.FelchParihar, V.V.PariharMayur, A.A.Mayur2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10449Ultra shallow junctions formed by sub-melt laser annealingProceedings paper