Prabhakara, ViveksharmaViveksharmaPrabhakaraJannis, DaenDaenJannisBéché, ArmandArmandBéchéBender, HugoHugoBenderVerbeeck, JohanJohanVerbeeck2021-10-292021-10-2920200268-1242https://imec-publications.be/handle/20.500.12860/35761Strain measurement in semiconductor FinFET devices using a novel moiré demodulation techniqueJournal articlehttps://doi.org/10.1088/1361-6641/ab5da2