Broadband and temperature tolerant silicon nitride liquid controlled waveguide coupler

d'Heer, HerbertHerbertd'HeerSaurav, KumarKumarSauravLerma Arce, ChristinaChristinaLerma ArceTuccio, SalvatoreSalvatoreTuccioClemmen, StephaneStephaneClemmenLenci, SilviaSilviaLenciStassen, AndimAndimStassenVan Thourhout, DriesDriesVan Thourhout2021-10-272021-10-272019-050733-8724https://imec-publications.be/handle/20.500.12860/32891Broadband and temperature tolerant silicon nitride liquid controlled waveguide couplerJournal articlehttps://ieeexplore.ieee.org/document/8653905