C2H4-based plasma-assisted CD shrink and contact patterning for RRAM application

Milenin, AlexeyAlexeyMileninLisoni, JuditJuditLisoniJossart, NicoNicoJossartJurczak, GosiaGosiaJurczakStruyf, HerbertHerbertStruyfShamiryan, DenisDenisShamiryanBrouri, MohandMohandBrouriBoullart, WernerWernerBoullart2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17631C2H4-based plasma-assisted CD shrink and contact patterning for RRAM applicationProceedings paper