Amorphous silicon: material for photonic-photonic and elctronic-photonic integration

Selvaraja, ShankarShankarSelvarajaDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16196Amorphous silicon: material for photonic-photonic and elctronic-photonic integrationProceedings paper