Radiation source dependence of degradation in shallow trench isolation diodes

Hayama, KiyoteruKiyoteruHayamaOhyama, HidenoriHidenoriOhyamaKobayasi, K.K.KobayasiPoyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysTakami, Y.Y.TakamiTakizawa, H.H.TakizawaMohammadzadeh, A.A.Mohammadzadeh2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4420Radiation source dependence of degradation in shallow trench isolation diodesProceedings paper