Janssens, TomTomJanssensKmieciak, MalgorzataMalgorzataKmieciakKittl, JorgeJorgeKittlFouchier, MarcMarcFouchierLauwers, AnneAnneLauwersKottantharayil, AnilAnilKottantharayilVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10645Dopant profiling in NixSi1-x gates with SIMSProceedings paper