Mid-infrared resonant ablation for selective patterning of thin organic films

Naithani, SanjeevSanjeevNaithaniDuterte, CharlesCharlesDuterteLevichkova, MarietaMarietaLevichkovaGrisard, ArnaudArnaudGrisardSchaubroeck, DavidDavidSchaubroeckLallier, EricEricLallierHernandez, YvesYvesHernandezWalzer, KarstenKarstenWalzerVan Steenberge, GeertGeertVan Steenberge2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24309Mid-infrared resonant ablation for selective patterning of thin organic filmsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1867850