Shamiryan, DenisDenisShamiryanYanovitskaya, Z.S.Z.S.YanovitskayaIacopi, FrancescaFrancescaIacopiMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8132Barrier deposition on porous low-k filmsProceedings paper