Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersSchulze, AndreasAndreasSchulzeArimura, HiroakiHiroakiArimuraCott, DaireDaireCottPorret, ClémentClémentPorretMertens, HansHansMertensRyan, PaulPaulRyanWall, JohnJohnWallMatney, KevinKevinMatneyWormington, MatthewMatthewWormingtonHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-232021-10-232016-10https://imec-publications.be/handle/20.500.12860/26928Processing technologies for advanced Ge devicesMeeting abstracthttps://ecs.confex.com/ecs/230/webprogram/Paper83005.html