The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers

Garner, GrantGrantGarnerWilliamson, L.L.WilliamsonSeidel, R.R.SeidelHur, S.S.Hurde Pablo, J.J.de PabloRincon Delgadillo, PaulinaPaulinaRincon DelgadilloGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25288The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymersProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2245964