Detavernier, C.C.DetavernierVan Meirhaeghe, R.L.R.L.Van MeirhaegheBender, HugoHugoBenderRichard, OlivierOlivierRichardBrijs, BertBertBrijsMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6274CoSi2 formation in the presence of carbonJournal article