Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis

Hantschel, ThomasThomasHantschelDe Wolf, PeterPeterDe WolfTrenkler, ThomasThomasTrenklerStephenson, RobertRobertStephensonVandervorst, WilfriedWilfriedVandervorst2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2619Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysisProceedings paper