Waiblinger, MarkusMarkusWaiblingerJonckheere, RikRikJonckheereBret, TristanTristanBretVan Den Heuvel, DieterDieterVan Den HeuvelBaur, CCBaurBaralia, GGBaralia2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21825The door opener for EUV mask repairProceedings paper