Phommahaxay, AlainAlainPhommahaxayBogaerts, LieveLieveBogaertsNaito, YasuyukiYasuyukiNaitoVan Cauwenberghe, MarcMarcVan CauwenbergheTutunjyan, NinaNinaTutunjyanOnishi, KeijiKeijiOnishiTilmans, HarrieHarrieTilmans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19575Thin MEMS packages obtained by a novel collective cap transfer processProceedings paper