Defect investigation of aluminum-induced crystallized silicon thin-films grown on bare and oxidized silicon wafers

Venkatachalam, SrisaranSrisaranVenkatachalamVan Gestel, DriesDriesVan GestelGordon, IvanIvanGordonQiu, YuYuQiuPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18254Defect investigation of aluminum-induced crystallized silicon thin-films grown on bare and oxidized silicon wafersMeeting abstract