First-principle calculations on gate/dielectric interfaces: on the origin of the work function shifts

Pourtois, GeoffreyGeoffreyPourtoisLauwers, AnneAnneLauwersKittl, JorgeJorgeKittlPantisano, LuigiLuigiPantisanoSoree, BartBartSoreeDe Gendt, StefanStefanDe GendtMagnus, WimWimMagnusHeyns, MarcMarcHeynsMaex, KarenKarenMaex2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/11049First-principle calculations on gate/dielectric interfaces: on the origin of the work function shiftsJournal article