Study of dielectric breakdown on 4.3 nm oxides using substrate hot electron injection

Nigam, TanyaTanyaNigamDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeyns2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2055Study of dielectric breakdown on 4.3 nm oxides using substrate hot electron injectionOral presentation