Oxygen scavenging by Ta spacers in double-MgO free layers for perpendicular spin-transfer torque magnetic random-access memory

Couet, SebastienSebastienCouetSwerts, JohanJohanSwertsMertens, SofieSofieMertensLin, TsannTsannLinTomczak, YoannYoannTomczakLiu, EnlongEnlongLiuDouhard, BastienBastienDouhardVan Elshocht, SvenSvenVan ElshochtFurnemont, ArnaudArnaudFurnemontKar, Gouri SankarGouri SankarKar2021-10-232021-10-2320161949-307Xhttps://imec-publications.be/handle/20.500.12860/26481Oxygen scavenging by Ta spacers in double-MgO free layers for perpendicular spin-transfer torque magnetic random-access memoryJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7439763&contentType=Journals+%26+Magazines&dld=aW1lYy5iZQ