High sputter bias super secondary grain initiation (in structures)

Vanstreels, KrisKrisVanstreelsBrongersma, SywertSywertBrongersmaD'Haen, JanJanD'HaenDemuynck, StevenStevenDemuynckDe Ceuninck, WardWardDe CeuninckCaluwaerts, RudyRudyCaluwaertsD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13144High sputter bias super secondary grain initiation (in structures)Proceedings paper