A high performance 0.18µm elevated source/drain technology with improved manufacturability

Augendre, EmmanuelEmmanuelAugendreRooyackers, RitaRitaRooyackersVandamme, EwoutEwoutVandammePerello, CarlesCarlesPerelloVan Dievel, MarcMarcVan DievelPochet, SandrineSandrinePochetBadenes, GonçalGonçalBadenes2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3194A high performance 0.18µm elevated source/drain technology with improved manufacturabilityProceedings paper