Rezvanov, AskarAskarRezvanovMiakonkikh, A.A.MiakonkikhVishnevskiy, A.A.VishnevskiyGitshin, O.O.GitshinRudenko, K.K.RudenkoBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27210Cryogenic etching of porous low-k dielectrics in CF3Br plasmaOral presentation