Caymax, MattyMattyCaymaxUto, AtsushiAtsushiUtoSakuraba, MasaoMasaoSakurabaMurota, JunichiJunichiMurota2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13490Change Of H-termination on wet cleaned Si9100) and Ge(100) by heat treatment In H2 or ArMeeting abstract