Van Barel, GregoryGregoryVan BarelMertens, LucLucMertensDe Ceuninck, WardWardDe CeuninckWitvrouw, AnnAnnWitvrouw2021-10-182021-10-1820100960-1317https://imec-publications.be/handle/20.500.12860/18143Apparent and steady-state etch rates in thin film etching and underetching of microstructures. I: ModelingJournal article