Negative bias temperature instabilities in HfSiON/TaN-based pMOSFETs

Houssa, MichelMichelHoussaAoulaiche, MarcMarcAoulaicheVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9060Negative bias temperature instabilities in HfSiON/TaN-based pMOSFETsProceedings paper