Intra-field stress impact on global wafer deformation

van Haren, RichardRichardvan HarenOtten, RonaldRonaldOttenSingh, SubodhSubodhSinghSingh, AmandevAmandevSinghVan Dijk, LeonLeonVan DijkOwen, DavidDavidOwenAnberg, DougDougAnbergMileham, JeffreyJeffreyMilehamGu, YajunYajunGuHermans, JanJanHermans2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34232Intra-field stress impact on global wafer deformationProceedings paperhttps://doi.org/10.1117/12.2515391