Holsteyns, FrankFrankHolsteynsRoels, JanJanRoelsKenis, KarineKarineKenisLe, Quoc ToanQuoc ToanLeMertens, PaulPaulMertens2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7658Monitoring and qualification using comprehensive surface hazeProceedings paper