Two-dimensional spreading resistance profiling: recent understandings and applications

Vandervorst, WilfriedWilfriedVandervorstPrivitera, VittorioVittorioPriviteraRaineri, VitoVitoRaineriClarysse, TrudoTrudoClaryssePawlik, M.M.Pawlik2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/421Two-dimensional spreading resistance profiling: recent understandings and applicationsJournal article