CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits

Dentoni Litta, EugenioEugenioDentoni LittaRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramSpessot, AlessioAlessioSpessotO'Sullivan, BarryBarryO'SullivanMachkaoutsan, VladimirVladimirMachkaoutsanFazan, PierrePierreFazanJi, YunhyuckYunhyuckJiMannaert, GeertGeertMannaertLorant, ChristopheChristopheLorantSebaai, FaridFaridSebaaiThiam, ArameArameThiamErcken, MoniqueMoniqueErckenDemuynck, StevenStevenDemuynckHoriguchi, NaotoNaotoHoriguchi2021-10-252021-10-2520180021-4922https://imec-publications.be/handle/20.500.12860/30596CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuitsJournal articlehttp://iopscience.iop.org/article/10.7567/JJAP.57.04FB08/meta