Delabie, AnneliesAnneliesDelabieNyns, LauraLauraNynsPopovici, Mihaela IoanaMihaela IoanaPopoviciCaymax, MattyMattyCaymaxVan Elshocht, SvenSvenVan ElshochtBrunco, DavidDavidBruncoSwerts, JohanJohanSwertsMaes, Jan WillemJan WillemMaesKim, EunjiEunjiKimMcIntyre, PaulPaulMcIntyre2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13651Impact of precursors in the atomic layer deposition of high-k dielectrics on semiconductor substratesMeeting abstract