Takagi, NoriakiNoriakiTakagiWatanabe, HidehiroHidehiroWatanabeVan Den Heuvel, DieterDieterVan Den HeuvelJonckheere, RikRikJonckheereGallagher, EmilyEmilyGallagher2021-10-222021-10-222015-07https://imec-publications.be/handle/20.500.12860/25974EUV scanner printability evaluation of natural blank defects detected by actinic blank inspectionProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2397264