Xie, WeiqiangWeiqiangXieFiers, MartinMartinFiersSelvaraja, ShankarShankarSelvarajaBienstman, PeterPeterBienstmanVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsilVan Thourhout, DriesDriesVan Thourhout2021-10-222021-10-2220140733-8724https://imec-publications.be/handle/20.500.12860/24844High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithographyJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6747322