Li, WaikinWaikinLiMao, MingMingMaoTrivkovic, DarkoDarkoTrivkovicMurdoch, GayleGayleMurdochHalder, SandipSandipHalderErcken, MoniqueMoniqueErcken2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28807imec's iN5 BEOL patterning developmentProceedings paper