Pelaz, L.L.PelazDuffy, RayRayDuffyAboy, M.M.AboyMarques, L.L.MarquesLopez, P.P.LopezSantos, I.I.SantosPawlak, BartekBartekPawlakVan Dal, MarkMarkVan DalDuriez, BlandineBlandineDuriezMerelle, ThomasThomasMerelleDoornbos, GerbenGerbenDoornbosCollaert, NadineNadineCollaertWitters, LiesbethLiesbethWittersRooyackers, RitaRitaRooyackersVandervorst, WilfriedWilfriedVandervorstJurczak, GosiaGosiaJurczakKaiser, M.M.KaiserWeemaes, R.R.WeemaesVan Berkum, J.J.Van BerkumBreimer, P.P.BreimerLander, RobRobLander2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14302Atomistic modeling of impurity ion implantation in ultra-thin-body Si devicesProceedings paper