Shi, XiaopingXiaopingShiTielens, HildeHildeTielensTakeoka, ShinjiShinjiTakeokaNakabayashi, TakashiTakashiNakabayashiNyns, LauraLauraNynsAdelmann, ChristophChristophAdelmannDelabie, AnneliesAnneliesDelabieSchram, TomTomSchramRagnarsson, Lars-AkeLars-AkeRagnarssonSchaekers, MarcMarcSchaekersDate, LucienLucienDateSchreutelkamp, RobRobSchreutelkampVan Elshocht, SvenSvenVan Elshocht2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/19770Development of ALD HfZrOx with TDEAH/TDEAZ and H2OJournal articlehttp://link.aip.org/link/?JES/158/H69