Clarysse, TrudoTrudoClarysseMoussa, AlainAlainMoussaParmentier, BrigitteBrigitteParmentierBogdanowicz, JanuszJanuszBogdanowiczCornagliotti, EmanueleEmanueleCornagliottiVandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBenderPfeffer, MarkusMarkusPfefferSchellenberger, MartinMartinSchellenbergerNielsen, PeterPeterNielsenThorsteinsson, SuneSuneThorsteinssonLin, RongRongLinPetersen, DirchDirchPetersen2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15114Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structuresProceedings paper