Khalilov, UmedjonUmedjonKhalilovPourtois, GeoffreyGeoffreyPourtoisvan Duin, AdriAdrivan DuinNeyts, EricEricNeyts2021-10-202021-10-2020120897-4756https://imec-publications.be/handle/20.500.12860/20928Self-limiting oxidation in small-diameter Si nanowiresJournal article